Chan, Kai-WingMazzarella, James R.Saha, Timo TZhang, William W.Biskach, Michael P.Numata, AiRiveros, Dr. Raul E.McClelland, Ryan S.Solly, Peter M.2019-10-182019-10-182019-09-09Kai-Wing Chan, James R. Mazzarella, Timo T. Saha, William W. Zhang, Michael P. Biskach, Ai Numata, Raul E. Riveros, Ryan S. McClelland, and Peter M. Solly "Recent advances in the alignment of silicon mirrors for high-resolution x-ray optics", Proc. SPIE 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX, 111190A (9 September 2019); https://doi.org/10.1117/12.2528746https://doi.org/10.1117/12.2528746http://hdl.handle.net/11603/15911SPIE Optical Engineering + Applications, 2019, San Diego, California, United StatesRecent advances in the fabrication of segmented silicon mirrors make it possible to build large-area, lightweight, high-resolution x-ray telescopes with arc-second angular resolution. To build such a telescope, we fabricate accurate silicon mirrors and develop alignment and bonding techniques to precisely align and integrate these silicon mirror segments into modular units. In this way, the processes of mirror fabrication, mirror alignment and bonding, and subsequent integration into units of successive larger scale are completely independent, and their technologies can be developed independently. In this paper, we present recent improvement in the precision of optical alignment and mirror bonding. We discuss the measurement of the mirror’s focusing in a parallel optical beam and address the practical challenges in bonding these mirrors into modules as an intermediate step to build up a full-scale telescope for space missions.12 pagesen-USThis item is likely protected under Title 17 of the U.S. Copyright Law. Unless on a Creative Commons license, for uses protected by Copyright Law, contact the copyright holder or the author.Copyright 2019 Society of Photo Optical Instrumentation Engineers (SPIE). ©2019 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.X-ray opticslightweight mirrorssegmented mirrorssilicon mirrorsmirror alignmentmirror bondingText