Flexible Polyimide based 34-channel Electrode Arrays for Mouse EEG Measurement
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Date
2019-01-01
Type of Work
Department
Computer Science and Electrical Engineering
Program
Engineering, Electrical
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Distribution Rights granted to UMBC by the author.
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Access limited to the UMBC community. Item may possibly be obtained via Interlibrary Loan thorugh a local library, pending author/copyright holder's permission.
This item is likely protected under Title 17 of the U.S. Copyright Law. Unless on a Creative Commons license, for uses protected by Copyright Law, contact the copyright holder or the author.
Abstract
Electroencephalogram (EEG) recording is a widely used method to measure electrical activity in the brain. Unlike other noninvasive recording techniques, EEG technique allows sub-ms scale time resolution, which is essential to obtain causal relationship. In this work, we demonstrated a microfabrication process for developing a high-density polyimide-based rodent EEG recording cap. A 34-channel rodent electrode array with a total size of 11mmx8mm, individual electrode diameter 240�m and interconnect wire linewidth 35�m, was designed and fabricated. For the fabrication process, a silicon substrate was used and polyimide caps were fabricated. Gold deposition and lithography etching of 34-channel contact-electrodes, along with interconnects, was completed as next step. Fully developed EEG cap was then interfaced with a 34-channel female connector, which will then be connected to an ADC for acquisition and post-processing. This polyimide based EEG cap is biocompatible and flexible, and therefore, suitable for good contact with rodent skulls and non-invasive recording.