Resolution enhancement with machine learning

Abstract

This numerical study uses machine learning techniques to enhance the resolution of local near-field probing measurements when the probe is larger than the examined device. The research shows that machine learning can achieve a spatial resolution of λ/10 with a few wavelength-wide probes while keeping the relative error below 3%. It also finds that fully connected neural networks outperform linear regression with limited training data, but linear regression is both sufficient and efficient for larger data sets. These results suggest that similar machine learning methods can improve the resolution of various experimental measurements.