Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter

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Electron-Beam_Deposition_of_Superconducting_Molybdenum_Thin_Films_for_the_Development_of_Mo_Au_TES_X-ray_Microcalorimeter.pdf (508.15 KB)

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https://ieeexplore.ieee.org/abstract/document/7762784/

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https://doi.org/10.1109/TASC.2016.2633785
 http://hdl.handle.net/11603/24015

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UMBC Center for Space Sciences and Technology (CSST) / Center for Research and Exploration in Space Sciences & Technology II (CRSST II)
UMBC Faculty Collection
UMBC Physics Department

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Author/Creator ORCID

https://orcid.org/0000-0003-0622-5174
 https://orcid.org/0000-0003-4096-4675
 https://orcid.org/0000-0002-9247-3010
 https://orcid.org/0000-0001-8397-9338

Date

2016-12-01

Type of Work

journal articles
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Citation of Original Publication

F. M. Finkbeiner et al., "Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter," in IEEE Transactions on Applied Superconductivity, vol. 27, no. 4, pp. 1-4, June 2017, Art no. 2100104, doi: 10.1109/TASC.2016.2633785.

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This work was written as part of one of the author's official duties as an Employee of the United States Government and is therefore a work of the United States Government. In accordance with 17 U.S.C. 105, no copyright protection is available for such works under U.S. Law.
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Abstract

We are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 °C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.