Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter

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dc.contributor.authorFinkbeiner, Fred Michael
dc.contributor.authorAdams, Joseph S.
dc.contributor.authorBandler, Simon R.
dc.contributor.authorBetancourt-Martinez, Gabriele L.
dc.contributor.authorMiniussi, Antoine
dc.contributor.authorSakai, Kazuhiro
dc.contributor.authorSmith, Stephen J.
dc.contributor.authorWakeham, Nicholas A.
dc.contributor.authoret al
dc.date.accessioned2022-01-18T16:20:32Z
dc.date.available2022-01-18T16:20:32Z
dc.date.issued2016-12-01
dc.descriptionFred Michael Finkbeiner, Joseph S. Adams, Simon R. Bandler, Gabriele L. Betancourt-Martinez, Ari David Brown, Meng-Ping Chang, James A. Chervenak, Meng P. Chiao, Aaron M. Datesman, Megan E. Eckart, Richard L. Kelley, Caroline A. Kilbourne, Antoine Miniussi, Samuel J. Moseley, Frederick Scott Porter, John E. Sadleir, Kazuhiro Sakai, Stephen James Smith, Nicholas A. Wakeham, Edward J. Wassell, and Wonisk Yoonen
dc.description.abstractWe are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 °C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.en
dc.description.urihttps://ieeexplore.ieee.org/abstract/document/7762784/en
dc.format.extent4 pagesen
dc.genrejournal articlesen
dc.identifierdoi:10.13016/m2wn9l-3t4m
dc.identifier.citationF. M. Finkbeiner et al., "Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter," in IEEE Transactions on Applied Superconductivity, vol. 27, no. 4, pp. 1-4, June 2017, Art no. 2100104, doi: 10.1109/TASC.2016.2633785.en
dc.identifier.urihttps://doi.org/10.1109/TASC.2016.2633785
dc.identifier.urihttp://hdl.handle.net/11603/24015
dc.language.isoenen
dc.publisherIEEEen
dc.relation.isAvailableAtThe University of Maryland, Baltimore County (UMBC)
dc.relation.ispartofUMBC Center for Space Sciences and Technology
dc.relation.ispartofUMBC Physics Department
dc.relation.ispartofUMBC Faculty Collection
dc.rightsPublic Domain Mark 1.0*
dc.rightsThis work was written as part of one of the author's official duties as an Employee of the United States Government and is therefore a work of the United States Government. In accordance with 17 U.S.C. 105, no copyright protection is available for such works under U.S. Law.en
dc.rights.urihttp://creativecommons.org/publicdomain/mark/1.0/*
dc.titleElectron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeteren
dc.typeTexten
dcterms.creatorhttps://orcid.org/0000-0003-0622-5174en
dcterms.creatorhttps://orcid.org/0000-0003-4096-4675en
dcterms.creatorhttps://orcid.org/0000-0002-9247-3010en
dcterms.creatorhttps://orcid.org/0000-0001-8397-9338en

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