Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter

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dc.contributor.authorFinkbeiner, Fred Michael
dc.contributor.authorAdams, Joseph S.
dc.contributor.authorBandler, Simon R.
dc.contributor.authorBetancourt-Martinez, Gabriele L.
dc.contributor.authorMiniussi, Antoine
dc.contributor.authorSakai, Kazuhiro
dc.contributor.authorSmith, Stephen J.
dc.contributor.authorWakeham, Nicholas A.
dc.contributor.authoret al
dc.date.accessioned2022-01-18T16:20:32Z
dc.date.available2022-01-18T16:20:32Z
dc.date.issued2016-12-01
dc.descriptionFred Michael Finkbeiner, Joseph S. Adams, Simon R. Bandler, Gabriele L. Betancourt-Martinez, Ari David Brown, Meng-Ping Chang, James A. Chervenak, Meng P. Chiao, Aaron M. Datesman, Megan E. Eckart, Richard L. Kelley, Caroline A. Kilbourne, Antoine Miniussi, Samuel J. Moseley, Frederick Scott Porter, John E. Sadleir, Kazuhiro Sakai, Stephen James Smith, Nicholas A. Wakeham, Edward J. Wassell, and Wonisk Yoonen_US
dc.description.abstractWe are exploring the properties of electron-beam evaporated molybdenum thin films on silicon nitride coated silicon wafers at substrate temperatures between room temperature and 650 °C. The temperature dependence of film stress, transition temperature, and electrical properties are presented. X-ray diffraction measurements are performed to gain information on molybdenum crystallite size and growth. Results show the dominant influence of the crystallite size on the intrinsic properties of our films. Wafer-scale uniformity, wafer yield, and optimal thermal bias regime for TES fabrication are discussed.en_US
dc.description.urihttps://ieeexplore.ieee.org/abstract/document/7762784/en_US
dc.format.extent4 pagesen_US
dc.genrejournal articlesen_US
dc.identifierdoi:10.13016/m2wn9l-3t4m
dc.identifier.citationF. M. Finkbeiner et al., "Electron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeter," in IEEE Transactions on Applied Superconductivity, vol. 27, no. 4, pp. 1-4, June 2017, Art no. 2100104, doi: 10.1109/TASC.2016.2633785.en_US
dc.identifier.urihttps://doi.org/10.1109/TASC.2016.2633785
dc.identifier.urihttp://hdl.handle.net/11603/24015
dc.language.isoen_USen_US
dc.publisherIEEEen_US
dc.relation.isAvailableAtThe University of Maryland, Baltimore County (UMBC)
dc.relation.ispartofUMBC Center for Space Sciences and Technology
dc.relation.ispartofUMBC Physics Department
dc.relation.ispartofUMBC Faculty Collection
dc.rightsThis work was written as part of one of the author's official duties as an Employee of the United States Government and is therefore a work of the United States Government. In accordance with 17 U.S.C. 105, no copyright protection is available for such works under U.S. Law.en_US
dc.rightsPublic Domain Mark 1.0*
dc.rights.urihttp://creativecommons.org/publicdomain/mark/1.0/*
dc.titleElectron-Beam Deposition of Superconducting Molybdenum Thin Films for the Development of Mo/Au TES X-ray Microcalorimeteren_US
dc.typeTexten_US
dcterms.creatorhttps://orcid.org/0000-0003-0622-5174en_US
dcterms.creatorhttps://orcid.org/0000-0003-4096-4675en_US
dcterms.creatorhttps://orcid.org/0000-0002-9247-3010en_US
dcterms.creatorhttps://orcid.org/0000-0001-8397-9338en_US

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