Flexible polyimide based 34-channel electrode arrays for mouse EEG measurement

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dc.contributor.authorChowdhury, Fatima Nafisa
dc.contributor.authorSood, Rachit
dc.contributor.authorNam, Hyungwoo
dc.contributor.authorLobo, Mary Kay
dc.contributor.authorChoa, Fow-Sen
dc.date.accessioned2019-06-03T14:48:21Z
dc.date.available2019-06-03T14:48:21Z
dc.date.issued2019-05-02
dc.descriptionSPIE Defense + Commercial Sensing, 2019, Baltimore, Maryland, United Statesen_US
dc.description.abstractElectroencephalogram (EEG) recording is a widely used method to measure electrical activity in the brain. Rodent EEG brain recording not only is noninvasive but also has the advantages to accomplish full brain monitoring, compared with that of the invasive techniques like micro-electrode-arrays. In comparison to other noninvasive recording techniques, EEG is the only technique that can achieve sub-ms scale time resolution, which is essential to obtain causal relationship. In this work, we demonstrated a simple microfabrication process for developing a high-density polyimide-based rodent EEG recording cap. A 34-channel rodent electrode array with a total size of 11mmx8mm, individual electrode diameter 240μm and interconnect wire linewidth 35μm was designed and fabricated. For the fabrication process, we first deposit 350nm SiO2 on a silicon substrate. We then fabricate 6-7μm thick first layer polyimide caps with fingers and contact holes. Gold deposition and then lithography etching of 34 channel contact-electrodes and their interconnects were fabricated in the second step. The third step was to cover metal interconnects with a 10μm thick second layer polyimide, which was fabricated with photolithography before the final film released by HF undercutting etching of SiO2 layer. Then the fabricated EEG cap is interfaced with a commercial 34-channel female connector, which is soldered with 34-line wires. These wires are then connected to an ADC to record the EEG data in computer for post-processing. With polyimide, the EEG cap is biocompatible, and flexible which makes it suitable for good contact with rodent skulls.en_US
dc.description.urihttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/11020/110200T/Flexible-polyimide-based-34-channel-electrode-arrays-for-mouse-EEG/10.1117/12.2518830.full?SSO=1en_US
dc.format.extent9 pagesen_US
dc.genreconference papers and proceedingsen_US
dc.identifierdoi:10.13016/m20xm9-0okq
dc.identifier.citationFatima Nafisa Chowdhury, Rachit Sood, Hyungwoo Nam, Mary Kay Lobo, and Fow-Sen Choa "Flexible polyimide based 34-channel electrode arrays for mouse EEG measurement", Proc. SPIE 11020, Smart Biomedical and Physiological Sensor Technology XV, 110200T (2 May 2019); doi: 10.1117/12.2518830; https://doi.org/10.1117/12.2518830en_US
dc.identifier.urihttps://doi.org/10.1117/12.2518830
dc.identifier.urihttp://hdl.handle.net/11603/13997
dc.language.isoen_USen_US
dc.publisherSPIEen_US
dc.relation.isAvailableAtThe University of Maryland, Baltimore County (UMBC)
dc.relation.ispartofUMBC Computer Science and Electrical Engineering Department Collection
dc.relation.ispartofUMBC Faculty Collection
dc.relation.ispartofUMBC Student Collection
dc.rightsThis item is likely protected under Title 17 of the U.S. Copyright Law. Unless on a Creative Commons license, for uses protected by Copyright Law, contact the copyright holder or the author.
dc.rights © (2019) Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
dc.subjectEEGen_US
dc.subjectPolyimideen_US
dc.subjectMicro-Fabricationen_US
dc.subjectPhotolithographyen_US
dc.subjectEEG Recording capen_US
dc.subjectBrain activityen_US
dc.subjectBiocompatibleen_US
dc.subjectflexible microelectrodeen_US
dc.titleFlexible polyimide based 34-channel electrode arrays for mouse EEG measurementen_US
dc.typeTexten_US

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