Fabrication of InAs quantum dots in AlAs∕GaAs DBR pillar microcavities for single photon sources

dc.contributor.authorZhang, Bingyang
dc.contributor.authorSolomon, Glenn S.
dc.contributor.authorPelton, Matthew
dc.contributor.authorPlant, Jocelyn
dc.contributor.authorSantori, Charles
dc.contributor.authorVučković, Jelena
dc.contributor.authorYamamoto, Yoshihisa
dc.date.accessioned2023-08-15T18:31:12Z
dc.date.available2023-08-15T18:31:12Z
dc.date.issued2005-03-21
dc.description.abstractWe report the molecular beam epitaxy growth of low-density strain-induced InAs quantum dots (QD) embedded in an AlAs∕GaAs distributed Bragg reflector structure for a triggered photon source. By optimal selection of growth temperature, InAs deposited thickness and other experimental parameters, it is possible to grow low density (10/μm²) InAs quantum dots with a suitable emission wavelength for a triggered photon source. The empirical formulas for the refractive indices of AlAs and GaAs materials at high temperature over a wide wavelength range are constructed by combining high resolution x-ray diffraction, dynamic optical reflectivity, and optical reflectivity spectrum techniques. Utilizing the electron-beam lithography and electron-cyclotron-resonance plasma etching techniques, a micropost microcavity with the top diameter of 0.6μm and the post height of 4.2μm has been fabricated. Narrow, spectrally limited single QD emission embedded in a micropost microcavity is observed in the photoluminescence.en_US
dc.description.urihttps://pubs.aip.org/aip/jap/article-abstract/97/7/073507/390111/Fabrication-of-InAs-quantum-dots-in-AlAs-GaAs-DBR?redirectedFrom=fulltexten_US
dc.format.extent8 pagesen_US
dc.genrejournal articlesen_US
dc.identifierdoi:10.13016/m2xave-evrt
dc.identifier.citationBingyang Zhang, Glenn S. Solomon, Matthew Pelton, Jocelyn Plant, Charles Santori, Jelena Vučković, Yoshihisa Yamamoto; Fabrication of InAs quantum dots in AlAs∕GaAs DBR pillar microcavities for single photon sources. Journal of Applied Physics 1 April 2005; 97 (7): 073507. https://doi.org/10.1063/1.1882764en_US
dc.identifier.urihttps://doi.org/10.1063/1.1882764
dc.identifier.urihttp://hdl.handle.net/11603/29240
dc.language.isoen_USen_US
dc.publisherAIPen_US
dc.relation.isAvailableAtThe University of Maryland, Baltimore County (UMBC)
dc.relation.ispartofUMBC Physics Department Collection
dc.rightsThis article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Bingyang Zhang, Glenn S. Solomon, Matthew Pelton, Jocelyn Plant, Charles Santori, Jelena Vučković, Yoshihisa Yamamoto; Fabrication of InAs quantum dots in AlAs∕GaAs DBR pillar microcavities for single photon sources. Journal of Applied Physics 1 April 2005; 97 (7): 073507. https://doi.org/10.1063/1.1882764 and may be found at https://doi.org/10.1063/1.1882764.en_US
dc.titleFabrication of InAs quantum dots in AlAs∕GaAs DBR pillar microcavities for single photon sourcesen_US
dc.typeTexten_US
dcterms.creatorhttps://orcid.org/0000-0002-6370-8765en_US

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