Design and fabrication of nano structures for Mid-IR antireflection surface texturing applications
| dc.contributor.author | Sood, Rachit M. | |
| dc.contributor.author | Nafisa, Fatima | |
| dc.contributor.author | Bamford, Douglas | |
| dc.contributor.author | Woolf, David | |
| dc.contributor.author | Hensley, Joel | |
| dc.contributor.author | Singh, Narsingh | |
| dc.contributor.author | Choa, Fow-Sen | |
| dc.date.accessioned | 2020-04-08T19:48:17Z | |
| dc.date.available | 2020-04-08T19:48:17Z | |
| dc.date.issued | 2020-02-28 | |
| dc.description | Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 112921F (2020) Event: SPIE OPTO, 2020, San Francisco, California, United States | en_US |
| dc.description.abstract | Reduction of unwanted light reflection from a surface of a substance is very essential for the improvement of the performance of optical and photonic devices. Anti-reflection (AR) surface textures can be created on the surface of lenses and other optical elements to reduce the intensity of surface reflections. AR textures are indispens able in numerous applications, both low and high power, and are increasingly demanded on highly curved optical components. Nanofabrication involves the fabrication of devices at the nanometer scale. In this work, we used nanofabrication to design and fabricate nanostructures of squares and hexagons of different spatial pitch and gap width in Gallium Arsenide (GaAs). These structures have a gap of 300nm, 400nm, and pitch of 900nm, 1000nm and 1100nm. The fabrication process involves solvent cleaning, deposition of silicon oxide, soft and hard bake, photolithography and development. Both wet and dry etching were used to fabricate the expected structures. Results from scanning electron microscopy (SEM) to examine the shapes of the fabricated arrays are presented in this study. By combining dry and wet etches, we obtained the desired shapes and depth of hexagons and squares with rounded edges. We report detailed fabrication processes and their corresponding results at each step. | en_US |
| dc.description.uri | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292/112921F/Design-and-fabrication-of-nano-structures-for-Mid-IR-antireflection/10.1117/12.2548392.short | en_US |
| dc.format.extent | 10 pages | en_US |
| dc.genre | conference papers and proceedings | en_US |
| dc.identifier | doi:10.13016/m28wqn-tmk0 | |
| dc.identifier.citation | Sood, Rachit M.; Nafisa, Fatimal; Bamford, Douglas; Woolf, David; Hensley, Joel; Singh, Narsingh; Choa, Fow-Sen; Design and fabrication of nano structures for Mid-IR antireflection surface texturing applications; Proceedings Volume 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII; 112921F (2020); https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11292/112921F/Design-and-fabrication-of-nano-structures-for-Mid-IR-antireflection/10.1117/12.2548392.short | en_US |
| dc.identifier.uri | https://doi.org/10.1117/12.2548392 | |
| dc.identifier.uri | http://hdl.handle.net/11603/17894 | |
| dc.language.iso | en_US | en_US |
| dc.publisher | SPIE | en_US |
| dc.relation.isAvailableAt | The University of Maryland, Baltimore County (UMBC) | |
| dc.relation.ispartof | UMBC Chemistry & Biochemistry Department Collection | |
| dc.relation.ispartof | UMBC Computer Science and Electrical Engineering Department | |
| dc.relation.ispartof | UMBC Student Collection | |
| dc.relation.ispartof | UMBC Faculty Collection | |
| dc.rights | This item is likely protected under Title 17 of the U.S. Copyright Law. Unless on a Creative Commons license, for uses protected by Copyright Law, contact the copyright holder or the author. | |
| dc.rights | ©2020 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. | |
| dc.title | Design and fabrication of nano structures for Mid-IR antireflection surface texturing applications | en_US |
| dc.type | Text | en_US |